000			00615pam a2200205a 44500
008			160408bc1993 xxu||||| |||| 00| 0 eng d
020			_a0824791460
082			_a621.38152 _bL967h
100			_aLuft, Werner
245	1		_aHYDROGENATED AMORPHOUS SILICON ALLOY DEPOSITION PROCESSES
260			_aNew York _bMarcel Dekker _cc1993
300			_axiv,327
440			_aApplied Physics Series _vV. 1
500			_aIncludes Bibliographical References And Index
650			_aThin Films -- Electric Properties
650			_aSilicon Alloys
700			_aTsuo, Y. Simon
964			_gCIRC
997			_aA116742 s C
999			_c324736 _d324736