000 00712pam a2200205a 44500
008 160408b1989 xxu||||| |||| 00| 0 eng d
020 _a1558990011
082 _a620.1127
_bP941
100 _aRehn, Lynn E.
245 1 _aPROCESSING AND CHARACTERIZATION OF MATERIALS USING ION BEAMS
_cSYMPOSIUM HELD IN NOV. 28-DEC. 2, 1988, BOSTON MASS.
260 _aPittsburgh
_bMaterials Research Society
_c1989
300 _axxiv,762
440 _aMaterials Research Society Symposium Proceedings
_vV. 128
650 _aIon Bombardment -- Congresses
650 _aIon Implantation -- Congresses
650 _aSurfaces (Physics) -- Congresses
700 _aSmidt, Fred A.
964 _gCIRC
997 _aA107152 s C
999 _c324451
_d324451