000			00608pam a2200205a 44500
008			160408b1987 xxu||||| |||| 00| 0 eng d
020			_a3718604132
082			_a537.622 _bAb32a
100			_aAbdullaev, G. B.
245	1		_aATOMIC DIFFUSION IN SEMICONDUCTOR STRUCTURES
260			_aChur _bHarwood Academic Pub. _c1987
300			_ax,340
500			_aIncludes Bibliographical References And Index
500			_aTranslationof : Atomnaia Diffuziia V Poluprovodnikovykh
650			_aSemiconductors
650			_aDiffusion
700			_aDzhafarov, T. D.
964			_gCIRC
997			_aA116708 C
999			_c322409 _d322409