| 000 | 00469pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b1989 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a087495754 | ||
| 082 |
_a537.622 _bSt52i |
||
| 100 | _aStievenard, D. | ||
| 245 | 1 | _aION IMPLANTATION IN SEMICONDUCTORS | |
| 260 |
_aAedermanndorf _bTrans Tech. Pub. _c1989 |
||
| 300 | _a437 | ||
| 650 | _aIon Inpalntation | ||
| 650 | _aSemiconductors | ||
| 700 | _aBourgoin, J. C. | ||
| 964 | _gCIRC | ||
| 997 | _aA106800 C | ||
| 999 |
_c322356 _d322356 |
||