| 000 | 00902pam a2200241a 44500 | ||
|---|---|---|---|
| 003 | OSt | ||
| 008 | 160408b1985 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0931837014 | ||
| 040 | _cIIT Kanpur | ||
| 041 | _aeng | ||
| 082 |
_a621.38152 _bIM7F |
||
| 245 | 1 |
_aIMPURITY DIFFUSION AND GETTERING IN SILICON _cedited by Fair, Richard B., Charles W. Pearce and Jack Washburn |
|
| 260 |
_bMaterials Research Society _c1985 _aPittsburgh |
||
| 300 | _axiii, 284p | ||
| 440 | _aMaterials research society symposia proceedings | ||
| 500 | _aIncludes Bibliographical References And Index. | ||
| 500 | _a"Proc.Of The Sym.On Impurity Diffusion And Gettering In Semiconductors...Held As Sym.C At The Mat.Res.Soc.Meeting,Nov.27-30,1984 In Boston." | ||
| 650 | _aSemiconductors--Defects--Cong | ||
| 650 | _aDiffusion--Cong | ||
| 700 | _aWashburn, Jack, ed. | ||
| 700 | _aPearce, Charles W., ed. | ||
| 942 | _cBK | ||
| 999 |
_c319852 _d319852 |
||