| 000 | 00576pam a2200205a 44500 | ||
|---|---|---|---|
| 008 | 160408bc1994 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a0471580058 | ||
| 082 |
_a621.38171 _bG371V2 |
||
| 100 | _aGhandhi,Sorab K. | ||
| 245 | 1 |
_aVLSI FABRICATION PRINCIPLES _cSILICON AND GALLIUM ARSENIDE |
|
| 250 | _a2nd | ||
| 260 |
_a _bJohn Wiley, New York _cc1994 |
||
| 300 | _axxiv,834, | ||
| 500 | _aIncludes Index. | ||
| 650 | _aIntegral Circuits -- Very Large Scale Integration | ||
| 650 | _aSilicon | ||
| 650 | _aGallium Arsenide | ||
| 964 | _gCIRC | ||
| 997 | _aA118227 C | ||
| 999 |
_c318260 _d318260 |
||