000 00800pam a2200217a 44500
008 160408bc1990 xxu||||| |||| 00| 0 eng d
020 _a1558990518
082 _a621.38152
_bIm7d
100 _aWolford, Donald J.
245 1 _aIMPURITIES, DEFECTS AND DIFFUSION IN SEMICONDUCTORS
_cBULK AND LAYERED STRUCTURES
260 _aPittsburgh
_bMaterials Research Society
_cc1990
300 _axxiv,1050
440 _aMaterials Research Society Symposium Proceedings
_vV. 163
500 _aProceedings Of The Materials Research Society Symposium, Boston, 1989
650 _aSemiconductors -- Impurity Distribution -- Cong
650 _aSemiconductors -- Defects -- Cong
650 _aSemiconductors -- Diffusion -- Cong
700 _aHaller, Eugene E.
964 _gCIRC
997 _aA111157 s C
999 _c316780
_d316780