| 000 | 00494pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b1988 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a044442878X | ||
| 082 |
_a621.692 _bD956h |
||
| 100 | _aDuval, Pierre | ||
| 245 | 1 | _aHIGH VACUUM PRODUCTION IN THE MICROELECTRONICS INDUSTRY | |
| 260 |
_aAmsterdam _bElsevier _c1988 |
||
| 300 | _axiii,222 | ||
| 440 |
_aPlasma Technology _vV. 2 |
||
| 650 | _aVacuum Technology | ||
| 650 | _aMicroelectronics | ||
| 964 | _gCIRC | ||
| 997 | _aA102341 C | ||
| 999 |
_c315947 _d315947 |
||