000 00338pam a2200121a 44500
008 160408b1990 xxu||||| |||| 00| 0 eng d
082 _a621.38152
_bIN8D V.2
100 _aSumino, K.
245 1 _aDEFECT CONTROL IN SEMICONDUCTORS
260 _aAmsterdam
_bNorth-Holland Publishing Company
_c1990
964 _gCIRC
997 _aA111109 s C
999 _c315729
_d315729