| 000 | 00450pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408b1980 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a047107828X | ||
| 082 |
_a537.52 _bC366g |
||
| 100 | _aChapman, Brian | ||
| 245 | 1 |
_aGLOW DISCHARGE PROCESSES _cSPUTTERING AND PLASMA ETCHING |
|
| 260 |
_aNew York _bWiley _c1980 |
||
| 300 | _axv,406 | ||
| 650 | _aSputtering (Physics) | ||
| 650 | _aGlow Discharges | ||
| 964 | _gCIRC | ||
| 997 | _aA103083 C | ||
| 999 |
_c315422 _d315422 |
||