000			00613pam a2200193a 44500
008			160408b1987 xxu||||| |||| 00| 0 eng d
020			_a3540179518
082			_a621.366 _bB692L
100			_aBoyd, Ian W.
245	1		_aLASER PROCESSING OF THIN FILMS AND MICROSTRUCTURES _cOXIDATION, DEPOSITION AND ETCHING OF INSULATORS
260			_aAmsterdam _bIos _c1987
300			_aviii,320
440			_aSpringer Series In Materials Science/Ed. Mooradian, Aram _vV. 3
650			_aLasers -- Industrial Applications
650			_aThin Films
650			_aMicrostructure
964			_gCIRC
997			_aA103560 s C
999			_c312955 _d312955