| 000 | 00382pam a2200145a 44500 | ||
|---|---|---|---|
| 008 | 160408b1988 xxu||||| |||| 00| 0 eng d | ||
| 010 | _a88071762 | ||
| 020 | _a0 87170 330 0 | ||
| 082 |
_a539.6 _bC76I |
||
| 100 | _aHochman, Robert F. | ||
| 245 | 1 | _aION IMPLANTATION AND PLASMA ASSISTED PROCESSES | |
| 260 |
_a _bAsm International _c1988 |
||
| 964 | _gCIRC | ||
| 997 | _aA107698 C | ||
| 999 |
_c312935 _d312935 |
||