000 00383pam a2200145a 44500
008 160408b1980 xxu||||| |||| 00| 0 eng d
082 _a621.3817
_bC672m
100 _aColclaser, Roy A.
245 1 _aMICROELECTRONICS
_cPROCESSING AND DEVICE DESIGN
260 _aNew York
_bWiley
_c1980
300 _aix,333
650 _aMicroelectronics
964 _gCIRC
997 _aA65275 s C
999 _c305873
_d305873