| 000 | 00433pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408b1982 xxu||||| |||| 00| 0 eng d | ||
| 082 |
_a621.3817 _bB784p |
||
| 100 | _aBrodie, Ivor | ||
| 245 | 1 | _aPHYSICS OF MICROFABRICATION | |
| 260 |
_aNew York _bPlenum Press _c1982 |
||
| 300 | _axix,503 | ||
| 650 | _aMicroelectronics | ||
| 650 | _aThinfilm Circuits | ||
| 700 | _aMuray, Julius J. | ||
| 964 | _gCIRC | ||
| 997 | _aA80470 C | ||
| 999 |
_c305872 _d305872 |
||