| 000 | 00580pam a2200157a 44500 | ||
|---|---|---|---|
| 008 | 160408b1983 xxu||||| |||| 00| 0 eng d | ||
| 040 | _aP K Kelkar Library, IIT Kanpur | ||
| 082 |
_a621.38173 _bV849 |
||
| 100 | _a | ||
| 245 | 1 |
_aVLSI electronics microstructure science [v.6] _bmaterials and process characterization _cedited by Norman G. Enspurch and Graydon B. Larrabee |
|
| 260 |
_aNew York _bAcademic Press _c1983 |
||
| 300 | _axii, 598p | ||
| 650 | _aIntegrated circuit -- Very large scale integration | ||
| 700 | _aEnspurch, Norman G., Ed. | ||
| 997 | _aA86465 s C | ||
| 999 |
_c305418 _d305418 |
||