000 00431pam a2200157a 44500
008 160408b1979 xxu||||| |||| 00| 0 eng d
082 _a621.38152
_bG446s
100 _aGise, Peter E.
245 1 _aSEMICONDUCTOR AND INTEGRATED CIRCUIT FABRICATION TECHNIQUES
260 _aReston
_bBreston Pub.
_c1979
300 _aix,209
650 _aSemiconductors
700 _aBlanchard, Richard
964 _gCIRC
997 _aA61497 C
999 _c299444
_d299444