| 000 | 00419pam a2200157a 44500 | ||
|---|---|---|---|
| 008 | 160408b1976 xxu||||| |||| 00| 0 eng d | ||
| 082 |
_a537.56 _bT665i |
||
| 100 | _aTownsend, P. D. | ||
| 245 | 1 | _aION IMPLANTATION, SPUTTERING AND THEIR APPLICATIONS | |
| 260 |
_aLondon _bAcademic Pr. _c1976 |
||
| 300 | _a333 | ||
| 650 | _aIon Inplantation | ||
| 700 | _aHartley, N. E. W. | ||
| 964 | _gCIRC | ||
| 997 | _aA51890 C | ||
| 999 |
_c295606 _d295606 |
||