000 00487pam a2200169a 44500
008 160408b1986 xxu||||| |||| 00| 0 eng d
082 _a621.366
_bAr15p
100 _aArata, Yoshiaki
245 1 _aPLASMA, ELECTRON AND LASER BEAM TECHNOLOGY
_cDEVELOPMENTS AND USE IN MATERIALS PROCESSING
260 _aMetals Park
_bAsm
_c1986
300 _ax,630
650 _aPlasma (Ionized Gases)
650 _aLaser Beams
650 _aElectron Beams
964 _gCIRC
997 _aA99050 s C
999 _c283373
_d283373