| 000 | 00442pam a2200157a 44500 | ||
|---|---|---|---|
| 008 | 160408b1980 xxu||||| |||| 00| 0 eng d | ||
| 082 |
_a621.3817 _bEL25t |
||
| 100 | _aBrewer, George Raymond | ||
| 245 | 1 | _aELECTRON-BEAM TECHNOLOGY IN MICROELECTRONIC FABRICATION | |
| 260 |
_aNew York _bAcademic _c1980 |
||
| 300 | _axi,362 | ||
| 650 | _aMicroelectronics | ||
| 650 | _aLithography, Electron Beam | ||
| 964 | _gCIRC | ||
| 997 | _aA65420 C | ||
| 999 |
_c283278 _d283278 |
||