| 000 | 00343pam a2200133a 44500 | ||
|---|---|---|---|
| 008 | 160408b1981 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a3 540 10521 2 | ||
| 082 |
_a530.41 _bSP98 V.1 |
||
| 100 | _aBehrisch, R. | ||
| 245 | 1 | _aSPUTTERING BY PARTICLE BOMBARDMENT I | |
| 260 |
_a _bSpringer-Verlag _c1981 |
||
| 964 | _gCIRC | ||
| 997 | _aA74364 C | ||
| 999 |
_c279232 _d279232 |
||