| 000 | 00475pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 160408b1982 xxu||||| |||| 00| 0 eng d | ||
| 082 |
_a548 _bSi34 |
||
| 100 | _aGrabmaier, J. | ||
| 245 | 1 | _aSILICON CHEMICAL ETCHING | |
| 260 |
_aBerlin _bSpringer-Verlag _c1982 |
||
| 300 | _a226 | ||
| 440 |
_aCrystals _v |
||
| 650 | _aSilicon -- Addresses, Essays, Lectures | ||
| 650 | _aCrystals -- Etching -- Addresses, Essays, Lectures | ||
| 964 | _gLOST | ||
| 997 | _aA78976 LOST C | ||
| 999 |
_c275929 _d275929 |
||