000 00382pam a2200157a 44500
008 160408b1982 xxu||||| |||| 00| 0 eng d
082 _a621.55
_bR742vt2
100 _aRoth, Alexander
245 1 _aVACUUM TECHNOLOGY
250 _a2nd
260 _aAmsterdam
_bNorth-Holland
_c1982
300 _axiv,531
650 _aVacuum Technology
964 _gCIRC
997 _aA75286 C
999 _c275305
_d275305