000 00610pam a2200193a 44500
008 160408b1971 xxu||||| |||| 00| 0 eng d
082 _a621.381
_bH191
100 _aMilek, John T.
245 1 _aSILICON NITRIDE FOR MICROELECTRONIC APPLICATIONS
260 _aNew York
_bIfi/Plenum
_c1971
300 _av.2
440 _aHandbook Of Electronic Materials
_vV. 3
500 _aContents. -- Pt. 1. Preparation And Properties -- Pt. 2. Applications And Devices
650 _aSilicon Nitride
650 _aSemiconductors
650 _aElectronics -- Materials
964 _gCIRC
997 _aA32959 v. 6 s C
999 _c263310
_d263310