000 | 00610pam a2200193a 44500 | ||
---|---|---|---|
008 | 160408b1971 xxu||||| |||| 00| 0 eng d | ||
082 |
_a621.381 _bH191 |
||
100 | _aMilek, John T. | ||
245 | 1 | _aSILICON NITRIDE FOR MICROELECTRONIC APPLICATIONS | |
260 |
_aNew York _bIfi/Plenum _c1971 |
||
300 | _av.2 | ||
440 |
_aHandbook Of Electronic Materials _vV. 3 |
||
500 | _aContents. -- Pt. 1. Preparation And Properties -- Pt. 2. Applications And Devices | ||
650 | _aSilicon Nitride | ||
650 | _aSemiconductors | ||
650 | _aElectronics -- Materials | ||
964 | _gCIRC | ||
997 | _aA32959 v. 6 s C | ||
999 |
_c263310 _d263310 |