| 000 | 00447pam a2200157a 44500 | ||
|---|---|---|---|
| 008 | 160408b1973 xxu||||| |||| 00| 0 eng d | ||
| 082 |
_a537.622 _bSh26 |
||
| 100 | _aShaw, D. | ||
| 245 | 1 | _aATOMIC DIFFUSION IN SEMICONDUCTORS | |
| 260 |
_aLondon _bPlenum Press _c1973 |
||
| 300 | _a607 | ||
| 650 | _aSemiconductors -- Addresses, Essays, Lectures | ||
| 650 | _aDiffusion -- Addresses, Essays, Lectures | ||
| 964 | _gCIRC | ||
| 997 | _aA27280 C | ||
| 999 |
_c259609 _d259609 |
||