000 | 00420pam a2200157a 44500 | ||
---|---|---|---|
008 | 160408b1973 xxu||||| |||| 00| 0 eng d | ||
082 |
_a621.38152028 _bW468 |
||
100 | _aWilson, Robert G. | ||
245 | 1 |
_aION BEAMS _cWITH APPLICATIONS TO ION IMPLANTATION |
|
260 |
_aN. Y. _bJohn Wiley _c1973 |
||
300 | _a500 | ||
650 | _aIon Implantation | ||
700 | _aBrewer, George R. | ||
964 | _gCIRC | ||
997 | _aA31652 C | ||
999 |
_c241120 _d241120 |