| 000 | 00498pam a2200181a 44500 | ||
|---|---|---|---|
| 008 | 160408b1970 xxu||||| |||| 00| 0 eng d | ||
| 082 |
_a621.38152 _bM452i |
||
| 100 | _aMayer, James W. | ||
| 245 | 1 |
_aION IMPLANTATION IN SEMICONDUCTORS _cSILICON AND GERMANIUM |
|
| 260 |
_aNew York _bAcademic Press _c1970 |
||
| 300 | _a280 | ||
| 500 | _aIncludes Bibliography | ||
| 650 | _aSemiconductors | ||
| 650 | _aIon Bombardment | ||
| 700 | _aDavies, John A. | ||
| 964 | _gCIRC | ||
| 997 | _aA13320 s C | ||
| 999 |
_c240581 _d240581 |
||