| 000 | 00421pam a2200157a 44500 | ||
|---|---|---|---|
| 008 | 160408b1973 xxu||||| |||| 00| 0 eng d | ||
| 082 |
_a621.38152028 _bW468 |
||
| 100 | _aWilson, Robert G. | ||
| 245 | 1 |
_aION BEAMS _cWITH APPLICATIONS TO ION IMPLANTATION |
|
| 260 |
_aN. Y. _bJohn Wiley _c1973 |
||
| 300 | _a500 | ||
| 650 | _aIon Implantation | ||
| 700 | _aBrewer, George R. | ||
| 964 | _gCIRC | ||
| 997 | _aA28368 s C | ||
| 999 |
_c239416 _d239416 |
||