Silicon processing for VLSI ERA [v.1]
By: Wolf, Stanley.
Contributor(s): Taubner, Richard N.
Material type:
BookPublisher: California Lattice Press 1986Description: xxxvi, 890p.Subject(s): Silicon | Integrated circuits -- Very large scale integration | Semi conductors -- EtchingDDC classification: 621.38173 | W831s2
Contents:
Contents: v.1. Process technology
| Item type | Current location | Collection | Call number | Copy number | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|---|---|
Books
|
PK Kelkar Library, IIT Kanpur | General Stacks | 621.38173 W831s2 (Browse shelf) | v.1 | Available | A177279 |
Total holds: 0
Contents: v.1. Process technology
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