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1. LECTURE NOTES ON PRINCIPLES OF PLASMA PROCESSING

by Chen,Francis F.,Chang,Jane P.

Material type: book Book; Format: print ; Literary form: not fiction Description: ix,208.Publisher: Kluwer Academic / Plenum Publishers,New York 2003Availability: Items available for loan: PK Kelkar Library, IIT Kanpur [Call number: 621.044 C421L] (1).

2. Lecture notes on principles of plasma processing

by Chen, Francis F | Chang, Jane P.

Material type: visual material Visual material Publisher: New York Kluwer Academic 2003Availability: Items available for reference: PK Kelkar Library, IIT Kanpur [Call number: A158049 GA2.4] (1).

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