Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices
By: Paik, Ungyu.
Contributor(s): Park, Jea-Gun.
Material type: BookPublisher: Boca Raton Crc Press 2009Description: xiii, 191p.ISBN: 9781420059113.Subject(s): Chemical mechanical planarizationDDC classification: 621.38152 | P153nItem type | Current location | Collection | Call number | url | Status | Date due | Barcode | Item holds |
---|---|---|---|---|---|---|---|---|
Books | PK Kelkar Library, IIT Kanpur | COMPACT STORAGE (BASEMENT) | 621.38152 P153n (Browse shelf) | Book Request | Available | A165392 |
Total holds: 0
Includes bibliographical references and index.
There are no comments for this item.