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MEMS/MOEMS COMPONENTS AND THEIR APPLICATIONS

By Janson,Siegfried W. Spie-The International Soc. For Optical Engg., Washington 2004 . xxxi,232 , Sponsored By Spie-The International Society For Optical Engineering | Includes Index 0819452521

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INTEGRATION AND PACKAGING OF MEMS, NEMS AND ELECTRONIC SYSTEMS, INTERPACK2005 (CD ROM ONLY)

American Society Of Mechanical Engineers, New York 0791837629

Place Hold on INTEGRATION AND PACKAGING OF MEMS, NEMS AND ELECTRONIC SYSTEMS, INTERPACK2005 (CD ROM ONLY)