621.38152028  / In8i4 <br/>
  <br/>
       ION IMPLANTATION TECHNIQUES 
 / INTERNATIONAL CONFERENCE ON ION IMPLANTATION : EQUIPMENT AND TECHNIQUES (4th : 1982 : BERCHTESGADEN) 
 .- Berlin: Springer-Verlag,  1982 
 .- xii,372,,,,,. 
.- ( Springer Series In Electrophysics  V. 10   
<br/><u>Subject Headings:</u> <br/>Ion Implantation -- Congresses;<br/>Ion Implantation -- Technique;
<br/><U>Author Added Entry: </u><br/>GLOISCHNING, H.;<br/>RYSSEL, H.;
<br><U>Copy Details:</u><br> Acc. No.: <b>A78788</b>, Full Call No.: 621.38152028 In8i4,   Item type:  Books , Location: COMPACT STORAGE (BASEMENT), <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>