621.381 / H872p
Huff, Michael
Process variations in microsystems manufacturing
/ Michael Huff
.- Switzerland: Springer, 2020
.- xix, 521p.
.- ( Microsystems and Nanosystems
** / edited by Roger T. Howe )
ISBN: 9783030405588
Subject Headings:
Microelectromechanical systems;
Manufactures;
Nanotechnology;
Copy Details:
Acc. No.: A185439, Full Call No.: 621.381 H872p, Item type: Books , Location: General Stacks,
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