620.5  / G229m <br/>
Gatzen, Hans H. <br/>
       Micro and Nano Fabrication [perpetual] : tools and processes 
 / Hans H. Gatzen, Volker Saile and Jurg Leuthold 
 .- New York: Springer,  2015 
 .- xxvi, 537p.. 
<br><u>ISBN:</u> 9783662443958 
<br/><u>Subject Headings:</u> <br/>Microelectromechanical systems;<br/>Microfabrication;
<br/><U>Author Added Entry: </u><br/>Saile, Volker;<br/>Leuthold, Jürg;
<br><U>Copy Details:</u><br> Acc. No.: <b>EBK10678</b>, Full Call No.: 620.5 G229m,   Item type:  E books , Location: Electronic Resources, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>