624.1762 <br/>
       Development of measurement capability for micro-vibration evaluation with application to chip fabrication facilities 
 / G. C. Lee ...[et al.] 
 .- Buffalo, New York: Multidisciplinary Center for Earthquake Engineering Research, University at Buffalo,  1999 
 .- xiii, 129p. 
.- ( Technical report Multidisciplinary Center for Earthquake Engineering Research [MCEER]   
  ** MCEER-99-0020, December 1, 1999  )
<br/>This research was conducted at the University at Buffalo, State University of New York and was supported in whole or in part by the National Science Foundation under Grant No. CMS 97-01471 and other sponsors. 
ISSN: 1520-295X 
<br/><u>Subject Headings:</u> <br/>Fabrication;<br/>Technical report;
<br/><U>Author Added Entry: </u><br/>Lee, G. C.;<br/>Liang, Z.;<br/>Song, J. W.;<br/>Shen, J. D.;
<br><U>Copy Details:</u><br> Acc. No.: <b>TR21402</b>, Full Call No.: 624.1762 MCEER-99-0020,   Item type:  Technical Report , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>