621.38152  / C152s2 <br/>
Campbell, Stephen A. <br/>
       The science and engineering of microelectronic fabrication 
 / Stephen A. Campbell 
 .- 2nd ed. 
 .- New York: Oxford University Press,  2001 
 .- xiv, 603p. 
.- ( The Oxford series in electrical engineering / edited by Adel S. Sedra   
<br><u>ISBN:</u> 9780195136050 
<br/><u>Subject Headings:</u> <br/>Semiconductors -- Design and construction;<br/>Microelectronics;
<br><U>Copy Details:</u><br> Acc. No.: <b>GB1219</b>, Full Call No.: 621.38152 C152s2,   Item type:  Books , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>