IEEE Transactions on Semiconductor Manufacturing  [e-journal] 
 / 
 .-  IEEE, 
ISSN: 0894-6507 
<br><U>Copy Details:</u><br> Acc. No.: <b>EJK3865</b>, Full Call No.: ,   Item type:  Electronic Journals , Location: , <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>