621.381 <br/>
       MEMS: A Practical Guide to Design, Analysis, and Applications  [electronic resource] / 
 / edited by Jan G. Korvink, Oliver Paul. 
 .- 900 p..  online resource. 
<br/><label>LC Class. No.: </label>TK7800-8360 TK7874-7874.9 
<br><u>ISBN:</u> 9783540336556 
<br/><label>Standard No.: </label>10.1007/978-3-540-33655-6  doi 
<br/><u>Subject Headings:</u> <br/>;<br/>;<br/>;<br/>;<br/>;<br/>;<br/>;<br/>;<br/>;<br/>;<br/>;<br/>;<br/>;
<br/><U>Author Added Entry: </u><br/>;<br/>;
<br><U>Copy Details:</u><br> Acc. No.: <b>EBKS0009083</b>, Full Call No.: ,   Item type:  E books , Location: , <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>