621.381 <br/>
       Wafer Level 3-D ICs Process Technology  [electronic resource] / 
 / edited by Chuan Seng Tan, Ronald J. Gutmann, L. Rafael Reif. 
 .- XII, 410 p..  online resource. 
  ** Integrated Circuits and Systems,  1558-9412  )
<br/><label>LC Class. No.: </label>TK7800-8360 TK7874-7874.9 
 - Integrated Circuits and Systems, .
<br><u>ISBN:</u> 9780387765341 
<br/><label>Standard No.: </label>10.1007/978-0-387-76534-1  doi 
<br/><u>Subject Headings:</u> <br/>Engineering.;<br/>Electronics.;<br/>Microelectronics.;<br/>Optical materials.;<br/>Electronic materials.;<br/>Materials;--Surfaces.<br/>Thin films.;<br/>Engineering.;<br/>Electronics and Microelectronics, Instrumentation.;<br/>Optical and Electronic Materials.;<br/>Surfaces and Interfaces, Thin Films.;<br/>Engineering, general.;
<br/><U>Author Added Entry: </u><br/>Tan, Chuan Seng.;<br/>Gutmann, Ronald J.;<br/>Reif, L. Rafael.;
<br><U>Copy Details:</u><br> Acc. No.: <b>EBK536</b>, Full Call No.: ,   Item type:  E books , Location: , <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>