621.38152  / N213c <br/>
       Chemical Physics of Thin Film Deposiion Processes for Micro- and Nano-Technologies 
 / edited by Yves Pauleau 
 .- London: Kluwer Academic Publishers ,  2002 
 .- xiii,363p. 
.- ( Nato science series   
  ** Series ii: Mathematics, Phyics and Chemistry -vol.55  )
<br><u>ISBN:</u> 1402005253 
<br/><u>Subject Headings:</u> <br/>Thin Flims -- Congresses;<br/>Nanotechnology -- Congresses;
<br/><U>Author Added Entry: </u><br/>Pauleau,Yves [ed.];
<br><U>Copy Details:</u><br> Acc. No.: <b>A140297</b>, Full Call No.: 621.38152 N213C,   Item type:  Books , Location: COMPACT STORAGE (BASEMENT), <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>