669.0284  / Sy68p <br/>
       Deposition of thin films by sputtering 
 / 
 .- New York: Rochester,  1967 
 .- 146 . 
<br/><u>Subject Headings:</u> <br/>Sputtering (Physics) -- Congresses;<br/>Ion Bombardment -- Congresses;
<br><U>Copy Details:</u><br> Acc. No.: <b>K14140</b>, Full Call No.: 669.0284 Sy68p,   Item type:  Books , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>