621.3  / P912 <br/>
<br/>
       Predictive simulation of semiconductor processing : status and challenges 
 / edited by J. Dabrowski and E. R. Weber 
 .- Berlin: Springer,  2004 
 .- xvii, 490p . 
.- ( Springer Series In Materials Science / Edited By R. Hull     
<br><u>ISBN:</u> 9783540204817 
<br/><u>Subject Headings:</u> <br/>Transistor.;<br/>Atomare Bewegung.;<br/>Computersimulation;
<br/><U>Author Added Entry: </u><br/>Dabrowski, J., Ed.;
<br><U>Copy Details:</u><br> Acc. No.: <b>A179494</b>, Full Call No.: 621.3 P912,   Item type:  Books , Location: COMPACT STORAGE (BASEMENT), <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>