621.381 / Ad95 Advanced mechatronics and MEMS devices / edited by Dan Zhang .- New York: Springer+Business Media, 2013 .- xi, 249p . .- ( Microsystems / Edited By Roger T. Howe ISBN: 9781441999849 Subject Headings: 621.381; Subjects--Geographic Terms: Ad95 Author Added Entry: Zhang, Dan, Ed.; Copy Details: Acc. No.: A177061, Full Call No.: 621.381 Ad95, Item type: Books , Location: COMPACT STORAGE (BASEMENT), ------------------------- --------------------- ------ --------- ------- ------- --------- --------