621.39732  / R242r <br/>
Rebohle,  Lars  <br/>
       Rare-earth implanted MOS devices for silicon photonics : microstructural, electrical and optoelectronic properties 
 / Lars Rebohle and Wolfgang Skorupa 
 .- Berlin: Springer,  2010 
 .- xviii, 173p . 
.- ( Springer Series In Materials Science / Edited By R. Hull  V.142   
<br><u>ISBN:</u> 9783642144462 
<br/><u>Subject Headings:</u> <br/>Metal oxide semiconductors;
<br/><U>Author Added Entry: </u><br/>Skorupa, Wolfgang.;
<br><U>Copy Details:</u><br> Acc. No.: <b>A173899</b>, Full Call No.: 621.39732 R242r,   Item type:  Books , Location: COMPACT STORAGE (BASEMENT), <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>