621.38173 / W831s2
Wolf, Stanley
Silicon processing for the VLSI ERA [v.2]
/ Stanley Wolf
.- California: Lattice Press, 2000
.- xxxvi, 890p .
Subject Headings:
Silicon;
Integrated circuits -- Very large scale information;
Semiconductors -- Etching;
Copy Details:
Acc. No.: A177277, Full Call No.: 621.38173 W831s2, (v.2) Item type: Books , Location: General Stacks,
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