621.38173 / W831s2
Wolf, Stanley
Silicon processing for VLSI ERA [v.1]
/ Stanley Wolf and Richard N. Taubner
.- California: Lattice Press, 1986
.- xxxvi, 890p .
Subject Headings:
Silicon;
Integrated circuits -- Very large scale integration;
Semi conductors -- Etching;
Author Added Entry:
Taubner, Richard N.;
Copy Details:
Acc. No.: A177279, Full Call No.: 621.38173 W831s2, (v.1) Item type: Books , Location: General Stacks,
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