621.395  / J175i2 <br/>
Jaeger, Richard C.  <br/>
       Introduction to microelectronic fabrication 
 / Richard C. Jaeger 
 .- 2nd 
 .- New Jersey: Prentice Hall,  2001 
 .- xi, 316p . 
.- ( Modular Series On Solid State Devices / Edited By Gerold W. Neudeck  V.5   
<br><u>ISBN:</u> 9780201444940 
<br/><u>Subject Headings:</u> <br/>Intergrated circuits -- Very large scale integration -- Design and construction -- Textbook;
<br><U>Copy Details:</u><br> Acc. No.: <b>A175162</b>, Full Call No.: 621.395 J175i2,   Item type:  Books , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>