621.38152 / M266f3
Madou, Marc J.
Fundamentals of microfabrication and nanotechnology [3 vol.] [3rd ed.]
/ Marc J. Madou
.- 3rd ed.
.- Boca Raton: CRC Press, 2012
.- 3v. (various pagings).
ISBN: 9780849331800
Subject Headings:
Microelectronics -- Design and construction;
Copy Details:
Acc. No.: A172487, Full Call No.: 621.38152 M266f3 v.3 cop.2, (Copy 2) Item type: Text Books , Location: TEXT, v.3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications
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Acc. No.: A172486, Full Call No.: 621.38152 M266f3 v.2 cop.2, (Copy 2) Item type: Text Books , Location: TEXT, v.2. Manufacturing techniques for microfabrication and nanotechnology
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Acc. No.: A172485, Full Call No.: 621.38152 M266f3 v.1 cop.2, (Copy 2) Item type: Text Books , Location: TEXT, v.1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
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Acc. No.: A172484, Full Call No.: 621.38152 M266f3 v.3 cop.1, (Copy 1) Item type: Text Books , Location: TEXT, v.3. From MEMS to Bio-MEMS and Bio-Nems, Manufacturaing techniques and applications
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Acc. No.: A172483, Full Call No.: 621.38152 M266f3 v.2 cop.1, (Copy 1) Item type: Text Books , Location: TEXT, v.2. Manufacturing techniques for microfabrication and nanotechnology
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Acc. No.: A172482, Full Call No.: 621.38152 M266f3 v.1 cop.1, (Copy 1) Item type: Text Books , Location: TEXT, v.1. Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
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