621.38152  / R275h <br/>
Reinhardt, Karen A. <br/>
       Handbook of cleaning for semiconductor manufacturing : fundamentals and applications 
 / Karen A. Reinhardt and Richard F. Reidy 
 .- New Jersey: John Wiley & Sons,  2011 
 .- xxii, 590p . 
<br><u>ISBN:</u> 9780470625958 
<br/><br/><label>Subjects--Uniform Titles: </label><br/>Semiconductors<br/>Optoelectronics
<br/><U>Author Added Entry: </u><br/>Reidy, Richard F.;
<br><U>Copy Details:</u><br> Acc. No.: <b>A171313</b>, Full Call No.: 621.38152 R275h,   Item type:  Books , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>