621.38152  / H191 <br/>
<br/>
       Handbook of silicon based MEMS materials and technologies 
 / edited by Veikko Lindroos ...[et al.] 
 .- Amsterdam: Elsevier,  2010 
 .- xxxii, 636p . 
.- ( Micro & Nano Technologies / Edited By Jeremy Ramsden     
<br><u>ISBN:</u> 9780815515944 
<br/><u>Subject Headings:</u> <br/>Microelectronical systems -- Materials;
<br/><U>Author Added Entry: </u><br/>Lindroos, Veikko;
<br><U>Copy Details:</u><br> Acc. No.: <b>A168960</b>, Full Call No.: 621.38152 H191,   Item type:  Books , Location: General Stacks, <br><b>------------------------- --------------------- ------ --------- ------- ------- --------- -------- </b><br>